半導体超薄膜の成長と物性評価
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- Material Type
- 記事
- Title
- Author/Editor
- 井上 正崇矢野 満明岩井 嘉男
- Periodical title
- 中研所報 / 大阪工大摂南大学中央研究所 [編]
- No. or year of volume/issue
- 21(2) 1988
- Volume
- 21
- Issue
- 2
- Pages
- p198～217
- Publication date of volume/issue (W3CDTF)
- 1988