真空ロボットの非接触ダイレクトドライブのための磁気浮上式リニアパルスモータの開発 (リニアドライブと関連技術<特集>)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 森山 伸一 他
- Series Title
- Author Heading
- Periodical title
- 電気学会論文誌. D, 産業応用部門誌 = IEEJ transactions on industry applications
- No. or year of volume/issue
- 115(3) 1995.02
- Volume
- 115
- Issue
- 3
- Pages
- p311～318