ファインセラミックスの超精密加工技術と最近の動向 (超精密加工技術とその高機能セラミックス基板・部品製作への適用<特集>)
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- Material Type
- 記事
- Author/Editor
- 河西 敏雄
- Series Title
- Author Heading
- Periodical title
- Ceramics Japan = セラミックス : bulletin of the Ceramic Society of Japan
- No. or year of volume/issue
- 30(1) 1995.01
- Volume
- 30
- Issue
- 1
- Pages
- p18～23