回折パターンによる極微細溝形状の測定評価に関する研究--矩形溝形状の測定評価
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 高谷 裕浩 他
- Author Heading
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 57(11) 1991.11
- Volume
- 57
- Issue
- 11
- Pages
- p2041～2047
- Publication date of volume/issue (W3CDTF)
- 1991-11