CVDダイヤモンド薄膜の電子デバイスへの応用 (ダイヤモンド薄膜の成膜技術・評価および応用<特集>)
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CiNii Research
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 岡野 健黒須 楯生飯田 昌盛
- Series Title
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 42(12) 1991.12
- Volume
- 42
- Issue
- 12
- Pages
- p1230～1234