熱CVD法によるジルコニア膜合成時の堆積速度の推定
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 中村 静夫 他
- Author Heading
- Periodical title
- 日本セラミックス協会学術論文誌 / 日本セラミックス協会 [編]
- No. or year of volume/issue
- 100(1159) 1992.03
- Volume
- 100
- Issue
- 1159
- Pages
- p266～271
- Publication date of volume/issue (W3CDTF)
- 1992-03