材料表面現象の第1原理分子動力学シミュレーション--シリコン単結晶(001)表面の水素終端化反応
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- Material Type
- 記事
- Author/Editor
- 広瀬 喜久治 他
- Author Heading
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 60(3) 1994.03
- Volume
- 60
- Issue
- 3
- Pages
- p402～406
- Publication date of volume/issue (W3CDTF)
- 1994-03