スパッタ法により作製したa-Si(:H)/a-SiC(:H)超格子薄膜の量子井戸効果
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 須崎 嘉文 他
- Author Heading
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 60(3) 1994.03
- Volume
- 60
- Issue
- 3
- Pages
- p393～396
- Publication date of volume/issue (W3CDTF)
- 1994-03