水平コールドウォール型CVD装置の熱流動特性および熱拡散現象
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- Material Type
- 記事
- Author/Editor
- 田之上 健一郎佐藤 恒之今石 宣之
- Periodical title
- 化学工学論文集
- No. or year of volume/issue
- 22(1) 1996.01
- Volume
- 22
- Issue
- 1
- Pages
- 140～149
- Publication date of volume/issue (W3CDTF)
- 1996-01