CF4を含む混合ガスの電子輸送特性
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CiNii Research
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- Material Type
- 記事
- Title
- Author/Editor
- 伊藤 秀範猪股 まどか松村 俊明 他
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 116(4) 1996.03
- Volume
- 116
- Issue
- 4
- Pages
- 328～333
- Publication date of volume/issue (W3CDTF)
- 1996-03