ポジ型レジスト特性に...

ポジ型レジスト特性に及ぼす溶剤の影響 (特集号 高分子の微細・精密加工とキャラクタリゼーションー1-)

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ポジ型レジスト特性に及ぼす溶剤の影響

(特集号 高分子の微細・精密加工とキャラクタリゼーションー1-)

Call No. (NDL)
Z17-92
Bibliographic ID of National Diet Library
3947648
Material type
記事
Author
浅海 慎五ほか
Publisher
東京 : 高分子学会
Publication date
1996-04
Material Format
Paper
Journal name
高分子論文集 = Japanese journal of polymer science and technology 53(4) 1996.04
Publication Page
p.264~267
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Paper

Material Type
記事
Author/Editor
浅海 慎五
小原 秀克
中山 寿昌 他
Periodical title
高分子論文集 = Japanese journal of polymer science and technology
No. or year of volume/issue
53(4) 1996.04
Volume
53
Issue
4
Pages
264~267