マイクロ波プラズマCVD法による種々の表面処理を施した炭素鋼基板でのダイヤモンド膜合成
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- Material Type
- 記事
- Author/Editor
- 田中 大之田中 寿晃相馬 英明 他
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 47(7) 1996.07
- Volume
- 47
- Issue
- 7
- Pages
- 611～615
- Publication date of volume/issue (W3CDTF)
- 1996-07