Diamond Film Formation by OH Radical Injection from Remote Microwave H2/H2O Plasma into Parallel-Plate RF Methanol Plasma
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- Material Type
- 記事
- Author/Editor
- Masanobu IkedaEtsuko MizunoMasaru Hori
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 35(9A) 1996.09
- Volume
- 35
- Issue
- 9A
- Pages
- 4826～4832
- Publication date of volume/issue (W3CDTF)
- 1996-09