フッ素,塩素負イオン生成とSi,SiO2とのエッチング反応 (負イオン特集 ; 負イオンを見直そう)
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- Material Type
- 記事
- Author/Editor
- 堀池 靖浩柴山 利一高柳 智士 他
- Series Title
- Periodical title
- プラズマ・核融合学会誌 = Journal of plasma and fusion research / プラズマ・核融合学会編集委員会 編
- No. or year of volume/issue
- 72(11) 1996.11
- Volume
- 72
- Issue
- 11
- Pages
- 1168～1174