ダイヤモンド薄膜の新しい機能とその可能性--冷陰極を中心に (特集 皮膜構造制御--新しい機能の発現をめざして)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 斎藤 光以沢辺 厚仁
- Series Title
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 47(12) 1996.12
- Volume
- 47
- Issue
- 12
- Pages
- 1014～1018