高周波スパッタ法によるFe/AlN積層膜の作製と磁性 (特集 磁性材料の化学(1))
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- Material Type
- 記事
- Author/Editor
- 藤木 充司吉川 信一高橋 昌男 他
- Series Title
- Periodical title
- 粉体および粉末冶金 = Journal of the Japan Society of Powder and Powder Metallurgy : 粉体粉末冶金協会誌 / 粉体粉末冶金協会 編
- No. or year of volume/issue
- 43(12) 1996.12
- Volume
- 43
- Issue
- 12
- Pages
- 1420～1425