スパッタ法でAl-Mg合金基板上に成膜したAlN薄膜の防食特性および皮膜構造に与える成膜時のArガス圧の影響
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- Material Type
- 記事
- Author/Editor
- 山本 兼司中山 武典佐藤 広士
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 48(1) 1997.01
- Volume
- 48
- Issue
- 1
- Pages
- 42～48
- Publication date of volume/issue (W3CDTF)
- 1997-01