熱フィラメントCVD法を用いた多結晶ダイヤモンド薄膜合成中における膜質判定
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 秋葉 幸男広瀬 洋一黒須 楯生 他
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 117(3) 1997.02
- Volume
- 117
- Issue
- 3
- Pages
- 283～288
- Publication date of volume/issue (W3CDTF)
- 1997-02