SiCヘテロ接合デバイスの製作
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- Material Type
- 記事
- Title
- Author/Editor
- 本田 光阿部 俊三四ノ宮 晴彦
- Periodical title
- 東北工業大学紀要. Ⅰ, 理工学編 = Memoirs of the Tohoku Institute of Technology. Ser. Ⅰ, Science and engineering
- No. or year of volume/issue
- (通号 17) 1997.03
- Sequential issue number
- 17
- Pages
- 151～156
- Publication date of volume/issue (W3CDTF)
- 1997-03
- ISSN (Periodical Title)
- 0285-3817