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Siウェハースライス用高強度高延性準安定オーステナイト系ステンレス薄鋼板の開発

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Siウェハースライス用高強度高延性準安定オーステナイト系ステンレス薄鋼板の開発

Call No. (NDL)
Z17-313
Bibliographic ID of National Diet Library
4194380
Material type
記事
Author
富村 宏紀ほか
Publisher
仙台 : 日本金属学会 ; 1994-
Publication date
1997-04
Material Format
Paper
Journal name
まてりあ = Materia Japan 36(4) 1997.04
Publication Page
p.361~363
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Paper

Material Type
記事
Author/Editor
富村 宏紀
宮楠 克久
広津 貞雄 他
Periodical title
まてりあ = Materia Japan
No. or year of volume/issue
36(4) 1997.04
Volume
36
Issue
4
Pages
361~363
Publication date of volume/issue (W3CDTF)
1997-04