LSI中の微細Al配...

LSI中の微細Al配線のエレクトロマイグレーションによる劣化機構 (特集「機能性材料の経年劣化の機構と寿命予測」)

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LSI中の微細Al配線のエレクトロマイグレーションによる劣化機構

(特集「機能性材料の経年劣化の機構と寿命予測」)

Call No. (NDL)
Z17-313
Bibliographic ID of National Diet Library
4194398
Material type
記事
Author
金子 尚史ほか
Publisher
仙台 : 日本金属学会 ; 1994-
Publication date
1997-04
Material Format
Paper
Journal name
まてりあ = Materia Japan 36(4) 1997.04
Publication Page
p.306~310
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Paper

Material Type
記事
Author/Editor
金子 尚史
川ノ上 孝
Periodical title
まてりあ = Materia Japan
No. or year of volume/issue
36(4) 1997.04
Volume
36
Issue
4
Pages
306~310