Three Dimensional Polysilicon Type Accelerometer Using Poly-Si/SiO2/Si/SiO2/Si Structure
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- Material Type
- 記事
- Author/Editor
- Kijin KwonYoshinori MatsumotoMakoto Ishida 他
- Author Heading
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 117(7) 1997.06
- Volume
- 117
- Issue
- 7
- Pages
- 384～390
- Publication date of volume/issue (W3CDTF)
- 1997-06