反応性真空アーク蒸着法によるアナターゼ型TiO2膜の生成

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反応性真空アーク蒸着法によるアナターゼ型TiO2膜の生成

Call No. (NDL)
Z16-793
Bibliographic ID of National Diet Library
4266941
Material type
記事
Author
滝川 浩史ほか
Publisher
東京 : 電気学会
Publication date
1997-07
Material Format
Paper
Journal name
電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials 117(8) 1997.07
Publication Page
p.866~872
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Paper Digital

Material Type
記事
Author/Editor
滝川 浩史
笹岡 毅志
榊原 建樹
Periodical title
電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
No. or year of volume/issue
117(8) 1997.07
Volume
117
Issue
8
Pages
866~872
Publication date of volume/issue (W3CDTF)
1997-07