Multi Contact Points Slider for A Surface Acoustic Wave Motor (特集:MEMS技術)
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- Material Type
- 記事
- Author/Editor
- Minoru KurosawaMakoto ChibaToshiro Higuchi
- Series Title
- Author Heading
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 117(8) 1997.07
- Volume
- 117
- Issue
- 8
- Pages
- 430～431