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イオンプレーティングによる表面改質と薄膜形成 (ミニ特集 『高エネルギービームによる材料の表面改質』)

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イオンプレーティングによる表面改質と薄膜形成

(ミニ特集 『高エネルギービームによる材料の表面改質』)

Call No. (NDL)
Z17-313
Bibliographic ID of National Diet Library
4285264
Material type
記事
Author
野瀬 正照
Publisher
仙台 : 日本金属学会 ; 1994-
Publication date
1997-08
Material Format
Paper
Journal name
まてりあ = Materia Japan 36(8) 1997.08
Publication Page
p.775~780
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Paper

Material Type
記事
Author/Editor
野瀬 正照
Author Heading
Periodical title
まてりあ = Materia Japan
No. or year of volume/issue
36(8) 1997.08
Volume
36
Issue
8
Pages
775~780