特集「センサ・アクチュエータ用無機機能性薄膜プロセス技術」
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CiNii Research
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- Material Type
- 記事
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 117(10) 1997.09
- Volume
- 117
- Issue
- 10
- Pages
- 488～518,532～533
- Publication date of volume/issue (W3CDTF)
- 1997-09
- ISSN (Periodical Title)
- 1341-8939
- ISSN-L (Periodical Title)
- 1341-8939