ECRスパッタ法を用いたPZT薄膜の形成と評価 (特集「センサ・アクチュエータ用無機機能性薄膜プロセス技術」)
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- Material Type
- 記事
- Author/Editor
- 大和田 邦樹田中 克彦久保 竜一
- Series Title
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 117(10) 1997.09
- Volume
- 117
- Issue
- 10
- Pages
- 497～500