ダイナミックイオンミキシング法によるTi1-xAlxN膜の電気化学インピーダンス特性
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- Material Type
- 記事
- Author/Editor
- 神谷 誠中村 勲鷹野 一朗 他
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 48(9) 1997.09
- Volume
- 48
- Issue
- 9
- Pages
- 913～918
- Publication date of volume/issue (W3CDTF)
- 1997-09