CBP法による円運動の測定精度に及ぼす浮遊容量の影響
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- Material Type
- 記事
- Author/Editor
- 奥山 繁樹矢野 博幸渡辺 昇一郎
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 63(10) 1997.10
- Volume
- 63
- Issue
- 10
- Pages
- 1427～1431
- Publication date of volume/issue (W3CDTF)
- 1997-10