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雑誌Journal of electron microscopy
Volume number46(1)-46(6):1997
ArticleHREM study...

HREM study of ion implantation in 6H-SiC at high temperatures

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HREM study of ion implantation in 6H-SiC at high temperatures

Call No. (NDL)
Z53-T76
Bibliographic ID of National Diet Library
4317174
Material type
記事
Author
O.I. Lebedevほか
Publisher
Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press
Publication date
1997-08
Material Format
Paper
Journal name
Journal of electron microscopy 46(4) 1997.08
Publication Page
p.271～279
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Paper

Material Type
記事
Title
HREM study of ion implantation in 6H-SiC at high temperatures
Author/Editor
O.I. Lebedev
G. Van Tendeloo
A.A. Suvorova 他
Author Heading
O.I. Lebedev
G. Van Tendeloo
A.A. Suvorova
Periodical title
Journal of electron microscopy
No. or year of volume/issue
46(4) 1997.08
Volume
46
Issue
4
Pages
271～279
Publication date of volume/issue (W3CDTF)
1997-08