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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 大塚 正男内田 孝幸菅原 将 他
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 117(11) 1997.10
- Volume
- 117
- Issue
- 11
- Pages
- 537～544
- Publication date of volume/issue (W3CDTF)
- 1997-10