スパッタビーム法によ...

スパッタビーム法による薄膜の形成

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スパッタビーム法による薄膜の形成

Call No. (NDL)
Z17-313
Bibliographic ID of National Diet Library
4324320
Material type
記事
Author
島田 寛ほか
Publisher
仙台 : 日本金属学会 ; 1994-
Publication date
1997-10
Material Format
Paper
Journal name
まてりあ = Materia Japan 36(10) 1997.10
Publication Page
p.1016~1020
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Paper

Material Type
記事
Author/Editor
島田 寛
岡本 聡
北上 修
Periodical title
まてりあ = Materia Japan
No. or year of volume/issue
36(10) 1997.10
Volume
36
Issue
10
Pages
1016~1020
Publication date of volume/issue (W3CDTF)
1997-10