VLSI製造のためのCVD装置設計とシミュレーション
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- Material Type
- 記事
- Author/Editor
- 佐藤 恒之秋山 泰伸
- Periodical title
- ペトロテック = Petrotech : 石油学会情報誌 / 石油学会 編
- No. or year of volume/issue
- 20(10) 1997.10
- Volume
- 20
- Issue
- 10
- Pages
- 829～835
- Publication date of volume/issue (W3CDTF)
- 1997-10