非晶質材料の経験的誘電関数と膜厚揺らぎモデル (特集:分光エリプソメトリー)
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- Material Type
- 記事
- Author/Editor
- 山口 十六夫
- Series Title
- Author Heading
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 18(11) 1997.11
- Volume
- 18
- Issue
- 11
- Pages
- 676～680