p形CVDダイヤモンド膜のピエゾ抵抗効果特性
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 出口 正洋北畠 真
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 117(12) 1997.11
- Volume
- 117
- Issue
- 12
- Pages
- 617～621
- Publication date of volume/issue (W3CDTF)
- 1997-11