静電型マイクロアクチュエータの弾性変形の解析
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- Material Type
- 記事
- Author/Editor
- 早川 和明鳥井 昭宏植田 明照
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 118(3) 1998.03
- Volume
- 118
- Issue
- 3
- Pages
- 205～211
- Publication date of volume/issue (W3CDTF)
- 1998-03