マイクロ波プラズマCVD法による傾斜機能皮膜の作製--酸化シリコン皮膜の表面はっ水化
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- Material Type
- 記事
- Author/Editor
- 穂積 篤梶田 巌高井 治
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 49(5) 1998.05
- Volume
- 49
- Issue
- 5
- Pages
- 489～495
- Publication date of volume/issue (W3CDTF)
- 1998-05