容量結合型RF放電の絶縁破壊機構 (特集 プロセスプラズマソース)
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- Material Type
- 記事
- Title
- Author/Editor
- 庄司 正文佐藤 益美
- Series Title
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 118(9) 1998.09
- Volume
- 118
- Issue
- 9
- Pages
- 936～941