シリコン表面におけるGa細線の形成とその特性 (特集:STM,AFMリソグラフィーによる半導体微細プロセスの現状)
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- Material Type
- 記事
- Author/Editor
- 橋詰 富博平家 誠嗣一杉 太郎 他
- Series Title
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 19(11) 1998.11
- Volume
- 19
- Issue
- 11
- Pages
- 716～721