Piezoelectric Actuator of LiNbO3 with an Integrated Displacement Sensor (Special Issue:Ultrasonic Electronics)
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- Material Type
- 記事
- Author/Editor
- Noboru WakatsukiHideki YokoyamaSubaru Kudo
- Series Title
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 37(5B) 1998.05
- Volume
- 37
- Issue
- 5B
- Pages
- 2970～2973