電流遮断法による単結晶シリコン陽極酸化の解析
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- Material Type
- 記事
- Author/Editor
- 柚賀 正光竹内 学大山 昌憲
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 50(3) 1999.03
- Volume
- 50
- Issue
- 3
- Pages
- 278～281
- Publication date of volume/issue (W3CDTF)
- 1999-03