電子サイクロトロン共鳴加熱プラズマを用いたリニアスパッタリング装置の作動特性
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 安井 利明松本 友宏田原 弘一 他
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 42(3) 1999.03
- Volume
- 42
- Issue
- 3
- Pages
- 279～281
- Publication date of volume/issue (W3CDTF)
- 1999-03