雑誌真空
高周波スパッタ法によ...

高周波スパッタ法により作製したGaIn系酸化物光記録膜

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高周波スパッタ法により作製したGaIn系酸化物光記録膜

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
4715340
Material type
記事
Author
青木 孝憲ほか
Publisher
東京 : 日本真空協会
Publication date
1999-03
Material Format
Paper
Journal name
真空 = Journal of the Vacuum Society of Japan 42(3) 1999.03
Publication Page
p.317~320
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Paper Digital

Material Type
記事
Author/Editor
青木 孝憲
海見 英樹
鈴木 晶雄 他
Periodical title
真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue
42(3) 1999.03
Volume
42
Issue
3
Pages
317~320
Publication date of volume/issue (W3CDTF)
1999-03