高エネルギー・高密度イオン注入によって作製したTiNの特性評価
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 三木 真一八束 充保橋本 好幸 他
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 119(5) 1999.05
- Volume
- 119
- Issue
- 5
- Pages
- 587～592
- Publication date of volume/issue (W3CDTF)
- 1999-05