多孔式電子ビーム励起プラズマソースの開発とダイヤモンド様炭素膜の作製
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- Material Type
- 記事
- Author/Editor
- 斉藤 博紀多田 重和鈴木 剛 他
- Periodical title
- 真空 = Journal of the Vacuum Society of Japan
- No. or year of volume/issue
- 42(3) 1999.03
- Volume
- 42
- Issue
- 3
- Pages
- 401～404
- Publication date of volume/issue (W3CDTF)
- 1999-03