Surface Reaction of a Low-Flux Atomic Oxygen Beam witha Spin-Coated Polyimide Film:Synergetic Effect of Atomic Oxygen and Ultraviolet Exposures

Journal name: Transactions of the Japan Society for Aeronautical and Space Sciences 42 (通号 135) 1999.05

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Material Type: 記事
Title: Surface Reaction of a Low-Flux Atomic Oxygen Beam witha Spin-Coated Polyimide Film:Synergetic Effect of Atomic Oxygen and Ultraviolet Exposures
Author/Editor: Masahito Tagawa
Toru Suetomi
Hiroshi Kinoshita 他
Author Heading: Masahito Tagawa
Toru Suetomi
Hiroshi Kinoshita
Periodical title: Transactions of the Japan Society for Aeronautical and Space Sciences
No. or year of volume/issue: 42 (通号 135) 1999.05
Volume: 42
Sequential issue number: 135
Pages: 40～45
Publication date of volume/issue (W3CDTF): 1999-05
ISSN (Periodical Title): 0549-3811
ISSN-L (Periodical Title): 0549-3811
Publication (Periodical Title): Tokyo : Japan Society for Aeronautical and Space Sciences
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZN25
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-M236
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4718635
http://id.ndl.go.jp/bib/4718635
Bibliographic Record Category (NDL): 632