STMによるシリコン酸化膜を用いたナノ加工プロセス
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- Material Type
- 記事
- Author/Editor
- 岩崎 裕李 楠吉信 達夫
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 20(6) 1999.06
- Volume
- 20
- Issue
- 6
- Pages
- 435～442
- Publication date of volume/issue (W3CDTF)
- 1999-06