雑誌真空
第5回スパッタリング...

第5回スパッタリングおよびプラズマプロセス国際シンポジウム(The Fifth International Symposium on Sputtering & Plasma Processes:ISSP'99)報告

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第5回スパッタリングおよびプラズマプロセス国際シンポジウム(The Fifth International Symposium on Sputtering & Plasma Processes:ISSP'99)報告

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
4892130
Material type
記事
Author
大工原 茂樹
Publisher
東京 : 日本真空協会
Publication date
1999-10
Material Format
Paper
Journal name
真空 = Journal of the Vacuum Society of Japan 42(10) 1999.10
Publication Page
p.933~935
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Paper

Material Type
記事
Author/Editor
大工原 茂樹
Author Heading
Periodical title
真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue
42(10) 1999.10
Volume
42
Issue
10
Pages
933~935
Publication date of volume/issue (W3CDTF)
1999-10