厚膜レジストSU-8による LIGAライクプロセス (小特集 マイクロマシンを実現する微細加工技術)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 川畑 達央
- Series Title
- Author Heading
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 50(11) 1999.11
- Volume
- 50
- Issue
- 11
- Pages
- 956～960