極微細低抵抗ゲート電...

極微細低抵抗ゲート電極配線技術

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極微細低抵抗ゲート電極配線技術

Call No. (NDL)
Z15-243
Bibliographic ID of National Diet Library
4897352
Material type
記事
Author
須黒 恭一
Publisher
東京 : 応用物理学会
Publication date
1999-11
Material Format
Paper
Journal name
応用物理 68(11) 1999.11
Publication Page
p.1258~1262
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Paper

Material Type
記事
Author/Editor
須黒 恭一
Author Heading
Periodical title
応用物理
No. or year of volume/issue
68(11) 1999.11
Volume
68
Issue
11
Pages
1258~1262
Publication date of volume/issue (W3CDTF)
1999-11